Capacitive Humidity Sensors

Introduction

The capacitive relative humidity sensor is a very common humidity measurement technology. This technology is found in around 75% of all humidity sensors.

How It Works

Capacitive element of a relative humidity sensor
[1]Rotronic Technical Note

This type of humidity sensor is built from a piece of dielectric material sandwiched between two electrodes in the form of conductive plates to form a capacitive device. The dielectric material is usually made from a plastic or other type of polymer.

The dielectric material absorbs or releases water moisture in proportion to the atmospheric relative humidity. This changes the capacitance. An increase of moisture raises the capacitance and conversely a reduction in moisture reduces the sensor's capacitance.

Simple diagram showing the components of a capacitive relative humidity sensor
[2]All About Circuits

The capacitive sensor element is wrapped top and bottom with protective layers during the manufacture of this type of sensor. When produced as a MEMS[3] package, this is attached to onboard capacitance measuring circuitry and an external interface such as serial I2C or SPI.

Capacitive relative humidity sensor packaged as a MEMS sensor
[2]All About Circuits

Advantages

It has many advantages including:

  • Low cost, low power consumption.
  • High accuracy and stability.
  • Rapid response to humidity changes.
  • Can withstand temperatures below 0°C, requiring minimal maintenance over time.
  • Independent of barometric pressure.

Disadvantages

Even good things usually have some disadvantages:

  • Temperature fluctuations affect sensitivity and accuracy.
  • Sensitive to corrosive gases and other chemicals in the atmosphere.
  • Can become contaminated with dust and other contaminants.
  • Long term stability can become an issue as they age.
  • High humidity or condensing conditions leads to lower response times.

References

  • [1] Rotronic Technical Note, (unkown publishing date) The Capacitive Humidity Sensor – How it Works & Attributes of the Uncertainty Budget
  • [2]All About Circuits, (2022) The Basics Behind a MEMS Capacitive Humidity Sensor, Available at: https://www.allaboutcircuits.com/technical-articles/mems-ic-capacitive-humidity-sensor-basics/
    Accessed May 2025